Numerical investigation of the effect of heat shield shape on the oxygen impurity distribution at the crystal-melt interface during the process of Czochralski silicon crystal growth

Article ID	Journal	Published Year	Pages	File Type
1791784	Journal of Crystal Growth	2012	6 Pages	PDF

Abstract

âº Effect of heat shield shape on oxygen for CZ furnace is studied. âº Oxygen is decreased by enlarging the horizontal length of the heat shield. âº The oxygen and SiO transport in CZ furnace with the heat shield shape is explained.

Keywords

A1. Heat transfer A1. Mass transfer A1. Computer simulation A1. Impurities B3. Solar cells

Related Topics

Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics

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Numerical investigation of the effect of heat shield shape on the oxygen impurity distribution at the crystal-melt interface during the process of Czochralski silicon crystal growth

Authors

Ying-Yang Teng, Jyh-Chen Chen, Cheng-Chuan Huang, Chung-Wei Lu, Wan-Ting Wun, Chi-Yung Chen,