Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1793276 | Journal of Crystal Growth | 2009 | 4 Pages |
Abstract
The influence of temperature on selective area (SA) InAs nanowire growth was investigated for metal-organic vapor phase epitaxy (MOVPE) using N2 as the carrier gas and (1 1 1) B GaAs substrates. In contrast to the growth temperature range – below 600 °C – reported for hydrogen ambient, the optimal growth temperature between 650 and 700 °C was 100 K higher than the optimal ones for H2 carrier gas. At these temperatures, nanowires with aspect ratios of about 80 and a symmetric hexagonal shape were obtained. The results found are attributed to the physical and chemical properties of the carrier gas.
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Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
M. Akabori, K. Sladek, H. Hardtdegen, Th. Schäpers, D. Grützmacher,