Nondestructive three-dimensional observation of defects in semi-insulating 6H-SiC single-crystal wafers using a scanning laser microscope (SLM) and infrared light-scattering tomography (IR-LST)

Peripheral and central areas of a semi-insulating 6H-SiC single-crystal wafer were examined using a scanning laser microscope (SLM) and infrared light-scattering tomography (IR-LST). The form and density of the defects in each area were observed by SLM. We reconstructed three-dimensional (3D) IR-LST images of scatterers by stacking 2D layer-by-layer IR-LST images on different planes. Using these 3D IR-LST images, variations in the defect distribution with depth were observed for the first time. To study the defect distribution and defect form in detail, we observed the defect configuration in the same volume as for 3D IR-LST images by magnified SLM and merged the images from the two techniques. Information on defects obtained using this approach will be very important in the development of high-quality semi-insulating silicon carbide (SiC) substrates.