Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1794223 | Journal of Crystal Growth | 2009 | 4 Pages |
Abstract
We have investigated the atomic-intermixing effect in In(Ga, Al)As/InP quantum dots (QDs) by tuning the group III compositions. The QDs including InAs, In0.95Al0.05As, and In0.95Ga0.05As were embedded in In0.52Al0.48As matrix. The intermixing process includes the deposition of a sputtered SiO2 layer on the sample surface and a subsequent rapid thermal annealing (RTA) at temperature between 700 and 800 °C. From the room-temperature photoluminescence data, InAs and In0.95Al0.05As QDs show similar wavelength tuning behavior against the RTA temperature. In0.95Ga0.05As QDs exhibit an extra amount of wavelength blue-shift, and have a maximum blue-shift of 281 nm at a RTA temperature of 800 °C. The results suggest an enhanced atomic-intermixing effect by the presence of Ga atoms.
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Authors
T.C. Hsu, T.E. Tzeng, E.Y. Lin, K.Y. Chuang, C.L. Chiu, T.S. Lay,