Article ID Journal Published Year Pages File Type
1794322 Journal of Crystal Growth 2008 4 Pages PDF
Abstract
Polycrystalline CaCu3Ti4O12 (CCTO) films were grown on Pt/Ti/SiO2/Si substrates using pulsed laser deposition. The choice of optimal laser fluence was found to be important to the microstructure and dielectric properties of CCTO films. Thin films with a (2 2 0) preferential orientation were obtained in a narrow fluence range of 1.8-2.0 J/cm2. Moreover, the CCTO films deposited at 2.0 J/cm2 showed high dielectric constant (2474) and low dielectric loss (0.05) at 10 kHz, which was ascribed to the improved crystallinity.
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Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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Effect of laser fluence on the microstructure and dielectric properties of pulsed laser-deposited CaCu3Ti4O12 thin films
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