Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1794485 | Journal of Crystal Growth | 2009 | 6 Pages |
Abstract
Different shapes and orientations of the RF-coil turns in oxide Czochralski crystal growth systems are considered and corresponding results of electromagnetic field and volumetric heat generation have been computed using a finite element method. For the calculations, the eddy current in the induction coil (i.e. the self-inductance effect) has been taken into account. The calculation results show the importance of cross section shape, geometry and position of the RF-coil turns with respect to the crucible and afterheater on the heat generation distribution in a Czochralski growth system.
Related Topics
Physical Sciences and Engineering
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Condensed Matter Physics
Authors
M.H. Tavakoli, A. Ojaghi, E. Mohammadi-Manesh, M. Mansour,