Article ID Journal Published Year Pages File Type
1794485 Journal of Crystal Growth 2009 6 Pages PDF
Abstract

Different shapes and orientations of the RF-coil turns in oxide Czochralski crystal growth systems are considered and corresponding results of electromagnetic field and volumetric heat generation have been computed using a finite element method. For the calculations, the eddy current in the induction coil (i.e. the self-inductance effect) has been taken into account. The calculation results show the importance of cross section shape, geometry and position of the RF-coil turns with respect to the crucible and afterheater on the heat generation distribution in a Czochralski growth system.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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