Article ID Journal Published Year Pages File Type
1794783 Journal of Crystal Growth 2008 8 Pages PDF
Abstract

Optical reflectance (R) and high-resolution X-ray diffraction (HR XRD) have been used for characterization and verification of the distributed Bragg reflectors (DBR) grown by two competing and complementary techniques: molecular beam epitaxy (MBE) and low-pressure metalorganic vapor phase epitaxy (LP MOVPE). The DBRs under study consisted of the stack of (Al)GaAs and AlAs quarter wavelength layers deposited on (1 0 0) oriented GaAs substrates. We demonstrate experimentally that employment of the above-mentioned methods allows for comprehensive characterization of the Bragg mirror properties and optimization of their fabrication procedure for application in highly demanding optical devices.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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