Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1794983 | Journal of Crystal Growth | 2008 | 6 Pages |
Abstract
We have studied the microstructure of TiO2 films, grown by reactive molecular beam epitaxy (MBE) on LaAlO3 (LAO) and SrTiO3 (STO) substrates, using a combination of transmission electron microscopy (TEM) and electron energy loss spectrometry (EELS). TiO2 films grew epitaxially in the anatase polymorph and exhibited the crystallographic orientation relation of (001)(010)TiO2||(001)(010)substrate. High-resolution TEM and EELS studies indicated the presence of a cubic TiOx phase at the TiO2/STO interface. Interfacial TiOx phases were eliminated and a sharp TiO2/STO interface was achieved by growing the TiO2 film on a heteroepitaxial STO buffer layer.
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Authors
X. Weng, P. Fisher, M. Skowronski, P.A. Salvador, O. Maksimov,