Chemical kinetics and mass transport effects in solution-based selective-area growth of ZnO nanorods

We present a combined experimental and modeling study of the dependence of solution-based zinc oxide (ZnO) selective-area growth rates on pattern dimension. Selective growth is achieved by patterning a portion of the substrate with an organic template that inhibits growth. The density of ZnO nanorods and the mass grown per unit area of exposed surface increases as the distance between the exposed growth regions is increased and as the width of the exposed lines is decreased. A 2-D model was developed to calculate selective growth at the exposed surface regions, the loss of reactant material due to a competing reaction in solution, liquid-phase and surface diffusive mass transport to (or on) the growth surface, and the ZnO growth reaction at the surface. To explain the experimental results, we found it necessary to include a reaction by-product in the chemistry model, the desorption of which is the rate limiting step. A relatively simple, three-step reaction mechanism, combined with the species mass transport model, provides a good, semi-quantitative description of the experimental observations in the selective-area growth of ZnO from supersaturated solutions.