| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1795946 | Journal of Crystal Growth | 2007 | 6 Pages |
Abstract
The solid Al-composition xAl depends critically on growth parameters for constant gas phase compositions. The strongest effect is found for total pressure: Al is efficiently incorporated only at pressures lower than 50Â mbar. This can be understood mainly as a result of prereactions in the gas phase involving TMAl and NH3 which has been discussed earlier in a theoretical paper of the Jensen group [T.G. Mihopoulos, V. Gupta, K.F. Jensen, J. Crystal Growth 195 (1998) 733]. In this publication we compare the predictions of this work with our data and implications for growth optimization.
Related Topics
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Condensed Matter Physics
Authors
U. Rossow, D. Fuhrmann, T. Litte, T. Retzlaff, L. Hoffmann, H. Bremers, A. Hangleiter,