| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1795947 | Journal of Crystal Growth | 2007 | 5 Pages |
Abstract
We investigated the relationship between the composition of AlGaN and the gas phase ratio of group-III metalorganic precursors at various TMAl flow rates. The composition of AlGaN significantly deviated from the linear relationship with the gas phase ratio. To elucidate the origin of the deviation, we performed the thermodynamic analysis. The effect of the growth parameters (ammonia decomposition ratio, growth pressure, and growth temperature) on the composition of AlGaN was examined. At 90% decomposition of ammonia, the calculated composition was in accordance with the experimental composition. The positive deviation of AlGaN composition is attributed to high ammonia decomposition ratio, low growth pressure, and high growth temperature.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Dong Woo Song, Hee Jin Kim, Yong Seon Jeon, Euijoon Yoon,