Structure-related infrared optical properties of Ba(ZrxTi1−x)O3 thin films grown on Pt/Ti/SiO2/Si substrates by low-temperature processing

The Ba(Zrx,Ti1−x)O3 (BZT) thin films on Pt(1 1 1)/Ti/SiO2/Si(1 0 0) substrates were fabricated by a sol–gel-hydrothermal (SGHT) process. The microstructural characteristics proved that the prepared BZT thin films with well-developed crystallinity and good surface morphology were converted from the amorphous phase to the perovskite phase at very low-temperature processing of 100–200 °C. The infrared optical properties of the BZT thin films have been investigated using an infrared spectroscopic ellipsometry in the wave number range of 800–4000 cm−1 (2.5–12.5 μm) by fitting the measured pseudodielectric functions with a three-phase model (Air/BZT/Pt), and a derived classical dispersion relation for the thin films. The optical constants of the thin films have been simultaneously obtained.