Article ID Journal Published Year Pages File Type
1796989 Journal of Crystal Growth 2006 5 Pages PDF
Abstract

A reliable method for depositing a layer of carbon on the inner walls of a fused silica ampoule is described and characterized. Carbon deposition rates were found to be 0.33 μm/h at mid-length and range from 0.26 to 0.55 μm/h at the ends of a 150 mm long ampoule. Deposition rate was found to vary along the length of the ampoule, but not along the radial perimeter.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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