| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1804837 | Journal of Magnetism and Magnetic Materials | 2007 | 5 Pages |
Abstract
A solenoid-type inductor was fabricated by MEMS (Microelectromechanical systems) technique. The fabrication process uses UV-LIGA, dry etching, fine polishing, and electroplating technique to achieve high performance of the solenoid-type inductor. Fe-based soft magnetic thin film was sputtered as the magnetic core, and polyimide was used as the insulation materials. The inductor was in size of 4×4 mm with coil width of 20 μm and space of 35 μm. The inductance is 1.61 μH at a frequency of 5 MHz with the maximum quality factor of 1.42.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Chong Lei, Yong Zhou, Xiao-Yu Gao, Wen Ding, Ying Cao, Hyung Choi, Jonghwa Won,