Alternate monatomic layer sputter deposition of FCT (L10-type) ordered FePt and CoPt films

FePt and CoPt alloy films with FCT(0 0 1) structural phase were deposited by sputtering. The films were formed by periodically alternating monatomic layers deposition of Fe(Co) and Pt, on MgO(1 0 0) substrates, with and without a Pt buffer layer, at substrate temperatures (TS) ranging from 200 to 500 °C. The X-ray diffraction patterns show the formation of the FCT crystalline structure in FePt films deposited at TS⩾200°C. Hysteresis measurements, using Vibrating Sample Magnetrometry, show that FePt and CoPt films with predominant FCT(0 0 1) phase are perpendicularly magnetized. The long range order parameter S=0.58S=0.58 demonstrates the good degree of chemical order in FePt film prepared at TS=400°C. The Experimental results demonstrate that the alternate monatomic layer sputter deposition technique is very effective to grow Fe(Co)Pt ordered alloy at moderate TS.