Sm–Co and Nd–Fe–B thin films with perpendicular anisotropy for high-density magnetic recording media

Sm–Co and Nd–Fe-B thin films have been prepared by sputtering. Particular efforts are concentrated on the perpendicular texture growth of the films. The Sm–Co and Nd–Fe–B thin films with perpendicular magnetic anisotropy can be prepared on Cu and W underlayer, respectively. Those underlayers play an important role to prevent oxidation and improve crystal lattice orientation. Perpendicular coercivity and remanent squareness ratio are higher than 10 kOe and almost 1.0, respectively, in both films prepared under optimum conditions.