Article ID Journal Published Year Pages File Type
1808581 Physica B: Condensed Matter 2016 4 Pages PDF
Abstract

We propose in this paper the characterization of a new generation of piezoelectric cantilevers called thick-films piezoelectric actuators. Based on the bonding and thinning process of a bulk PZT layer onto a silicon layer, these cantilevers can provide better static and dynamic performances compared to traditional piezocantilevers, additionally to the small dimensions.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
Authors
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