| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1808581 | Physica B: Condensed Matter | 2016 | 4 Pages |
Abstract
We propose in this paper the characterization of a new generation of piezoelectric cantilevers called thick-films piezoelectric actuators. Based on the bonding and thinning process of a bulk PZT layer onto a silicon layer, these cantilevers can provide better static and dynamic performances compared to traditional piezocantilevers, additionally to the small dimensions.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Vincent Chalvet, Didace Habineza, Micky Rakotondrabe, Cédric Clévy,