| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1815089 | Physica B: Condensed Matter | 2007 | 4 Pages |
Abstract
ZnO-based film bulk acoustic resonator (FBAR) was fabricated with many ZnO/Pt layers by magnetron sputtering. All the layers are good crystallized and highly textured. By crystallographic test, the orientation fluctuation of Pt layer increases with increasing film thickness or stack layers, whereas that of ZnO layer decreases slightly. It is consistent with ZnO grain c-axis tilting observed using transmission electron microscopy. Due to these good quality layers, the device has a high resonate frequency of 3.94Â GHz.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Zhi Yan, Yi Ming Mi, Zhi Tang Song, Wei Li Liu, Hong Ji, Song Lin Feng,