3D invariant embedding model for backscattering electrons applied to materials characterization

In this work, the results of a 3D model used to describe the fraction of backscattered electrons, together with its energy and angular distributions, are reported. This 3D model is the result of improvements in the Invariant Embedding Approach to Microanalysis (IEAM). Comparisons with experiment show that the theoretical results follow the general trend of experimental data, when parameters (such as atomic number, energy of the impinging electrons and tilted angle) are changed.