| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1815473 | Physica B: Condensed Matter | 2009 | 6 Pages |
Abstract
Thin films of CaO were grown on silicon (Si) and lanthanum aluminate (LaAlO3) substrates by pulsed injection metal-organic chemical vapour deposition in a vertical injection MOCVD system. Growth parameters were systematically varied to study their effect on film growth and quality and to determine the optimal growth conditions for this material. Film quality and growth rate were evaluated by atomic force microscopy, X-ray diffraction and Rutherford Backscattering Spectroscopy measurements. Optimised conditions allowed growing transparent, single phase films textured along the (0 0 l) direction.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
R.P. Borges, P. Ferreira, A. Saraiva, R. Gonçalves, M.A. Rosa, A.P. Gonçalves, R.C. da Silva, S. Magalhães, M.J.V. Lourenço, F.J.V. Santos, M. Godinho,