| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1815595 | Physica B: Condensed Matter | 2007 | 6 Pages |
Abstract
70% SiC-C films were prepared with magnetron sputtering deposition followed by Ar+ ion bombardment. Hydrogen was then introduced to these films with ion implantation and permeation techniques for a comparison. Infrared (IR) transmission measurements were performed to analyze the hydrogen-related vibrational states in carbon-carbide. And secondary ion mass spectrometry (SIMS) was also employed to analyze hydrogen depth profiles in these SiC-C films.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
L.W. Wang, B. Yang, D.Z. Wang, N.K. Huang,