Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1816692 | Physica B: Condensed Matter | 2006 | 5 Pages |
Gettering behaviors of Fe into solar cell grade Si are investigated by deep level transient spectroscopy. The samples contaminated with Fe in the range of the concentration of 1.5×1012–2.0×1014 cm−3 were annealed at 600 °C to induce gettering. It is shown that the surface layer gettering behaviors of Fe for the sample without p+ layer strongly depend on the Fe contamination level, in which the surface layer gettering is not effective for the sample with low level contamination <1×1013 cm−3 but effective for the sample with middle level contamination of 1–5×1013 cm−3. In contrast, the samples with p+ layer show effective gettering for low and middle level contaminations. The gettering mechanisms in solar cell grade Si without and with p+ layer are discussed in details.