Effects of arrival ratio and inclined angle on the orientation competition in ion beam assisting deposited yttria-stabilized zirconia thin films

► A previously found orientation competition in IBAD-SZ thin film was studied in detail. ► A (0 0 1) oriented biaxial texture was gradually induced by increasing arrival ratio. ► In the case of ion beam assisted inclined deposition, (0 0 1) orientation was enhanced. ► An inclined growth of the grains was found in ion assisting inclined deposition.