Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1818748 | Physica C: Superconductivity and its Applications | 2010 | 4 Pages |
Abstract
The buffer layers consisted of three layers; CeO2 as the seed layer, yttrium-stabilized zirconia (YSZ) as the diffusion barrier layer and CeO2 as the lattice matching layer. They were grown by the RF-sputtering method and the electron beam evaporation technique (EB). EB deposition has possibility of higher throughput compared with the RF-sputtering. The intensity ratio of (2Â 0Â 0) to (2Â 0Â 0)Â +Â (1Â 1Â 1) for the lattice matching layer showed as high as 98%. The uniform properties of 40Â m long and 30Â mm wide substrates were successfully produced by all sputtering method. Additionally, the tape travel speed of the seed layer can be increased from 7Â m/h (RF-sputtering deposition) to 10Â m/h (EB deposition) on short sample (0.3Â m long).
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
T. Yamaguchi, H. Ota, K. Ohki, M. Konishi, K. Ohmatsu,