| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1820552 | Physica C: Superconductivity and its Applications | 2006 | 6 Pages |
Abstract
The removal of adsorbed impurities from the film surface and the increase of the film density are investigated by a biased third electrode that promotes the positive ions bombardment of the growing film. A mixed bias-magnetron has been built using a positively charged metal grid positioned all around the cathode.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
G. Lanza, J. Bermudez, A. Frigo, H. Padamsee, V. Palmieri, D. Tonini,