| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1822549 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2014 | 8 Pages |
Abstract
We developed a Monolithic Hollow Penta-Prism Long Trace Profiler-NOM (MHPP-LTP-NOM) to attain nano-accuracy in testing plane- and near-plane-mirrors. A new developed Monolithic Hollow Penta-Prism (MHPP) combined with the advantages of PPLTP and autocollimator ELCOMAT of the Nano-Optic-Measuring Machine (NOM) is used to enhance the accuracy and stability of our measurements.Our precise system-alignment method by using a newly developed CCD position-monitor system (PMS) assured significant thermal stability and, along with our optimized noise-reduction analytic method, ensured nano-accuracy measurements. Herein we report our tests results; all errors are about 60 nrad rms or less in tests of plane- and near-plane- mirrors.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Shinan Qian, Lewis Wayne, Mourad Idir,