Article ID Journal Published Year Pages File Type
1823174 Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2013 5 Pages PDF
Abstract

Recently, a project within the European Metrology Research Program (EMRP) started with the aim of improving the form metrology of optical surfaces. Within this project, in a work package on high accuracy flatness metrology, the National Metrology Institutes of the Czech Republic (CMI) and Germany (PTB) are involved. In the following, this EMRP project, the capabilities of CMI and PTB and the aims of the project will be presented. The new developments in flatness metrology cover the reduction of uncertainty, the enhancement of lateral resolution of deflectometric methods and the test of capacitive sensors for flatness metrology.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Instrumentation
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