| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1823182 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2013 | 5 Pages |
Abstract
Broadly applicable, in situ at-wavelength metrology methods for x-ray optics are currently under development at the Advanced Light Source. We demonstrate the use of quantitative wavefront feedback from a lateral shearing interferometer for the suppression of aberrations. With the high sensitivity provided by the interferometer we were able to optimally tune the bending couples of a single elliptical mirror (NA=2.7 mrad) in order to focus a beam of soft x-rays (1.24 keV) to a nearly diffraction-limited beam waist size of 156(±10)nm.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Daniel J. Merthe, Kenneth A. Goldberg, Valeriy V. Yashchuk, Wayne R. McKinney, Richard Celestre, Iacopo Mochi, James MacDougall, Gregory Y. Morrison, Senajith B. Rekawa, Erik Anderson, Brian V. Smith, Edward E. Domning, Howard Padmore,