| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1823184 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2013 | 5 Pages |
Abstract
An adaptive X-ray mirror with shape controllability in a spatial wavelength range longer than 20 mm was developed, and we demonstrated its shape generation and focusing performance characteristics. The shape accuracy in a spatial wavelength range shorter than 20 mm, which cannot be adaptively figured, was controlled in advance offline. A pencil beam method for measuring the slope error and a phase retrieval method for precisely estimating the wavefront error were employed for online shape correction. A focal spot size of 120 nm, which is diffraction-limited, was realized, and the shape accuracy obtained nearly satisfied Rayleigh's quarter-wavelength criterion.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Hiroki Nakamori, Satoshi Matsuyama, Shota Imai, Takashi Kimura, Yasuhisa Sano, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi,