Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1824298 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2011 | 4 Pages |
Abstract
Aperiodic molybdenum/silicon (Mo/Si) multilayer designed as a broadband polarizer with reflectivity over a wide wavelength range of 13–30 nm at a fixed incidence angle of 45° was developed by a numerical method. The multilayer was prepared using direct current magnetron sputtering. The reflectivity and polarizing properties were characterized using synchrotron radiation. In 13–30 nm wavelength region, the measured s-reflectivity (Rs) with standard deviation is 13.5%±3.1%, p-reflectivity (Rp) with standard deviation is 1.4%±0.5%. The mean of polarization degree is 81.2%. This broadband multilayer polarizer can be used in extreme ultraviolet polarization measurements, and will greatly simplify experimental arrangements.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
M.Y. Tan, J.T. Zhu, L.Y. Chen, Z.S. Wang, K. Le Guen, P. Jonnard, A. Giglia, N. Mahne, S. Nannarone,