| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1825012 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2011 | 5 Pages |
Abstract
The paper surveys new features of the EOD program, a complete workplace for the design of electron and ion microscopes. The extensions of the program for space charge computations, interaction with gases in the specimen chamber and misalignments are handled as plug-ins, keeping the program as a single unit. The current status of the tolerancing plug-in is described in more detail.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
J. Zlámal, B. Lencová,