| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1825202 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2011 | 4 Pages |
Abstract
The application of vertically integrated (3D) electronics to particle physics has been explored by the our group for the past several years. We have successfully designed the first vertically integrated demonstrator chip for ILC vertex detection in the three-tier MIT-Lincoln Labs process. We have also studied sensor integration with electronics through oxide bonding and silicon-on-insulator technology. This paper will discuss the status of these studies and prospects for future work.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Ronald Lipton,