| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1825672 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2011 | 6 Pages |
Abstract
At the Advanced Light Source (ALS), we are developing broadly applicable, high-accuracy, in-situ, at-wavelength wavefront slope measurement techniques for Kirkpatrick–Baez (KB) mirror nano-focusing. In this paper, we report an initial cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror. This cross-check provides a validation of the in-situ shearing interferometry, currently under development at the ALS.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Sheng Yuan, Kenneth A. Goldberg, Valeriy V. Yashchuk, Richard Celestre, Wayne R. McKinney, Gregory Morrison, James Macdougall, Iacopo Mochi, Tony Warwick,