| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1826628 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2010 | 7 Pages |
Abstract
The proliferation of autocollimator-based surface profilometers at synchrotron metrology laboratories worldwide necessitates a detailed understanding of the parameters influencing their angular response. A comprehensive overview of the current status of autocollimator characterization and calibration at the Physikalisch-Technische Bundesanstalt (PTB) and its implications for their optimal application are provided. Present and future challenges to angle metrology posed by autocollimator-based surface profilometers will be delineated, and solutions and expected progress to meet them will be outlined.
Related Topics
Physical Sciences and Engineering
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Instrumentation
Authors
Ralf D. Geckeler, Andreas Just, Michael Krause, Valeriy V. Yashchuk,