| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1826638 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2010 | 5 Pages |
Abstract
Unknown linearity errors of long trace profilers (LTP) are a troublesome source of measurement errors and discrepancies from instrument to instrument, especially on strongly curved surfaces. This article describes a complete procedure of LTP data acquisition and data processing, which allow to, simultaneously, evaluate the linearity error and reconstruct a corrected slope profile. The method has been tested by performing independent measurements of the same mirrors on SOLEIL and ESRF LTP. Results show that independent measurements using this procedure are in agreement down to 0.2 μrad RMS in slope and 1.6 nm in height.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
François Polack, Muriel Thomasset, Sylvain Brochet, Amparo Rommeveaux,