| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1826643 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2010 | 4 Pages |
Abstract
The long trace profiler (LTP) at SPring-8 has been upgraded to improve stability and resolution of slope measurement. The performances of the upgraded LTP at SPring-8 are presented by cross-checking measurements on a flat mirror with data obtained using Nanometer Optical Component Measuring Machine (NOM) at the Helmholtz Zentrum Berlin / BESSY-II.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Y. Senba, H. Kishimoto, H. Ohashi, H. Yumoto, T. Zeschke, F. Siewert, S. Goto, T. Ishikawa,