| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1826645 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2010 | 5 Pages |
Abstract
We describe a method for characterizing sub-10-nm X-ray beams using knife-edge scanning with dark-field geometry. Beam profile measurement by the conventional dark-field method is simulated numerically, and the signal intensity is found to depend strongly on the incident angle of the beam components. A numerical procedure to correct the dependence and to determine the actual beam profile is presented.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Soichiro Handa, Takashi Kimura, Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi,