| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1828274 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2009 | 4 Pages |
Abstract
In this work the contour visualization method of developed high aspect ratio microstructures with any lateral size of ∼1 μm in thick PMMA layers using normal and tilted SR exposure is proposed in order to investigate the microstructures behaviour and the development process. This method can be also applied in situ during the development process.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
V. Nazmov, J. Mohr, E. Reznikova,