| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1828439 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2008 | 4 Pages |
Abstract
The amelioration of present X-ray imaging systems especially in computed tomography to resolutions below 1 μm necessitates very precise equipment details such as the manipulators, focus size and stability of the tube and the detector adjustment. In this paper, we present an experimental setup of a computed tomography system with sub-micrometer resolution. The requirements on and characteristics of the components and their influence on the measurements are discussed and exemplary results of different test objects in the field of non-destructive testing with sub-micrometer resolution are presented.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
M. Salamon, R. Hanke, P. Krüger, N. Uhlmann, V. Voland,