Measurement of carbon sputtering yield by N+ ion beam and lifetime dependence of resulting foils on thickness

Carbon stripper foils with a higher nitrogen content were made by ion beam sputtering with reactive nitrogen gas. Such foils seem to be very useful as strippers for high-intensity heavy ion accelerators. To know further characteristics of the lifetime of such carbon foils, we have measured the sputtering yield of the carbon source material at a sputtering voltage of 4–15 kV and the lifetime dependence of such foils on thickness. Lifetime measurement was performed with a 3.2 MeV Ne+ ion beam. The sputtering yield on average showed 0.75 atoms/ion at over 9 kV sputtering voltage. The lifetime of the foils noticeably depends on the foil thickness, and the thickness range as practical stripper foil is to be around 15 to 33 μg/cm2. Two foils made at 13 kV showed extremely long lifetimes of 6800 and 6000 mC/cm2 at maximum and the foils made above 10 kV lived longer than about 900 mC/cm2, which correspond to about 270 and 40 times longer than commercially available best foils. We measured the thickness ratio of nitrogen to carbon in each foil made at the different sputtering voltages and at the different irradiation stages (mC/cm2) by RBS method. We also inspected the structure of a nitrided carbon foil by transmission electron microscopy.