| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1830069 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2007 | 4 Pages |
Abstract
We present our development of novel light-weight and low-cost micro-pore X-ray optics based on the Micro Electro Mechanical Systems (MEMS) technologies. We successfully fabricated X-ray mirror chips with surface roughness less than several nm and an accurately defined optic mount. Our studies suggest this type of optics is a promising device for X-ray optics in many research fields such as space research, nuclear physics, and microanalysis.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Y. Ezoe, M. Koshiishi, M. Mita, K. Mitsuda, A. Hoshino, Y. Ishisaki, T. Takano, R. Maeda,