Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1860818 | Physics Letters A | 2009 | 6 Pages |
Abstract
We consider both theoretically and experimentally self-organization process of quasi-equilibrium steady-state condensation of sputtered substance in accumulative ion-plasma devices. It has been shown that the self-organization effect is caused by self-consistent variations of the condensate temperature and the supersaturation of depositing atoms. Two possible types of self-organization process have been found out on the basis of the phase-plane method. The aluminium condensation experimental data confirming the self-organization nature of quasi-equilibrium steady-state condensation are discussed.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Physics and Astronomy (General)
Authors
V.I. Perekrestov, A.I. Olemskoi, Yu.O. Kosminska, A.A. Mokrenko,