Article ID Journal Published Year Pages File Type
1861160 Physics Letters A 2008 4 Pages PDF
Abstract

The Paschen curve shows that the breakdown voltage over a gap is a non-linear function of the product of the gas pressure and the gap distance for plasmas which are generated inside an electric field driven source. The Paschen breakdown relationship does not depend on the applied frequency and covers secondary emission at the electrodes of the discharge. Adapting the Paschen curve, a breakdown curve for a time-dependent magnetic field, typical for inductively coupled plasmas which sources are without electrodes, is examined here. It is shown that in this case the magnetic field breakdown curve does depend on the applied frequency.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Physics and Astronomy (General)
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