Electrons impinging on solid targets: An approximation of the differential elastic scattering cross-section

An approximation of the differential elastic scattering cross-section based on that of Rutherford differential cross section in the study of the interaction of electron beams with solid targets in the primary energy range from 1 to 4 keV is proposed. The approximation is used to make the calculations in applications such as Monte Carlo simulation more accurate than the previously reported ones. Some applications are presented for the calculation of the backscattering coefficient of electrons backscattered from semi-infinite Al, Cu and Au and the elastic mean free-path of the implanted electrons using Monte Carlo technique.