| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1869209 | Physics Procedia | 2013 | 7 Pages |
Abstract
TiO2 thin films are grown by pulsed direct liquid injection atomic layer deposition with rapid thermal heating using titanium tetraisopropoxide and water vapor as precursors. The ALD growth rate is constant in the saturation zone range 35-47 ms at the temperature deposition of 280 °C. The TiO2 growth rate of 0.018 nm/cycle was achieved in a self-limited ALD mode. SEM and AFM analysis showed the as-deposited films have a smooth surface with a low roughness. XPS analysis exhibited the stoichiometry of TiO2 in the homogenous depth composition.
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