Micro-machined Pendulum and Non-driven Micro-machined Gyroscope

The paper reported a new type of micro-machined pendulum which had gyroscopic effect when installed in rotating carrier. It was demonstrated that a micro-machined pendulum installed in rotating carrier, using the spinning of rotating carrier instead of traditional gyroscope's driving force produced by its structure form a non-driven micro- machined gyroscope. The new micro-machined gyroscope can output pitching, yawing and rolling angular velocity of the rotating carrier, which is equivalent to three traditional gyroscopes.