Article ID Journal Published Year Pages File Type
1870745 Physics Procedia 2010 9 Pages PDF
Abstract

High-resolution laser patterning offers innovative methods for the manufacturing of threedimensional interconnect devices. The process chain presented in this paper uses cost efficient metal thin-films sputtered on thermoplastic sheets and two-dimensional high speed laserprocessing, whereas the three-dimensional shape of the end product is realized by deep drawing of the machined sheet. Due to the lower fracture strain of metals in comparison to thermoplastics extensive fragmentation of the deposited metal film occurs during deep drawing; therefore picosecond laser fine structuring is used to provide strain relief in the circuitry and to preserve the conductivity after the drawing process.

Related Topics
Physical Sciences and Engineering Physics and Astronomy Physics and Astronomy (General)