| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1872018 | Physics Procedia | 2013 | 5 Pages |
Abstract
The spatial light modulator together with the computer generated holograms can be used to shape laser beam to correspond for specific need of the micromachining task. Especially dividing the original laser energy to beam array enables high degree of parallelism in laser micromachining. Spatial light modulator together with femtosecond laser enables fast machining of the complex structures with feature sizes down to a few microns.
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