| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1872101 | Physics Procedia | 2012 | 8 Pages |
This article presents the application of a mathematical model with a statistical experiment in order to develop robust surface properties of zirconium nitride (ZrN) films. In this research, ZrN films, with a (Ti,Cr) interface, were prepared by an unbalanced magnetron (UBM) sputtering. An experimental array was employed in a few tests. A second-order model resulting from the experiments on film thickness in the UBM sputtering processes was explored. In this study, the desired thickness that significantly influenced the characteristics and structural performance was achieved in the ZrN films; it guided the smaller worn scar depth and yielded larger adhesive strength. Furthermore, a quadric model was constructed efficiently in regard to film thickness variations. The predicted values and experimental results are close, which shows that the quadric model can be effectively used to predict surface properties of ZrN films in a UBM sputtering system.
