Stroboscopic oblique-incidence interferometer for motion visualization of stator of ultrasonic motor.

This paper describes a motion-visualization technique for an ultrasonic motor (USM) by using a stroboscopic oblique-incidence interferometer. Characteristics of USM depend on a vibration mode of a stator which is one of main component of USM. Though there are some visualization techniques of its vibrated mode, it is difficult to visualization. Because the surface of the stator is rough for a light. For visualization such a surface, we focused on an oblique-incidence interferometer. The interferometer is well suited to analyze the rough surface because a scattering at the rough surface is reduced by using an oblique-incidence light. Furthermore, for detecting a vibrated surface, a pulsed light synchronized with stator was used as light source. We have succeeded to detect a periodically movement of fringe patterns of the vibrated stator.